Micro electromechanical systems (MEMS) based capacitive pressure sensor for ultral-low pressure using graphene has been proposed. The characteristics of sensor such as membrane displacement, capacitance and sensitivity of sensor with external pressure effect are simulated and analyzed using Comsol Multiphysics software. The obtained results show that the MEMS capacitive pressure sensor using 3, 5, 7-layer graphene exhibits the sensitivity of 230.8 aF/Pa, 174.4 aF/Pa and 144.4 aF/Pa, respectively.
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Vinh University journal of science

Tạp chí khoa học Trường Đại học Vinh

ISSN: 1859 - 2228

Governing body: Vinh University

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License: 163/GP-BTTTT issued by the Minister of Information and Communications on May 10, 2023

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